Correct Answer - Option 2 : In modern MOS transistors, the metal layer is often replaced by highly doped Si
3N
4
The MOS transistor (or MOSFET, i.e., MOS field-effect transistor) derives its name from the materials involved in the early transistors of this type: metal, oxide (SiO2), and semiconductor.
In modern MOS transistors, the metal layer is often replaced by highly doped polycrystalline silicon, and the oxide layer by a combination of SiO2 and Si3N4 or by other insulators.
The semiconductor is invariably silicon because it is relatively difficult to grow or deposit a high-quality insulating layer on other semiconductors.