Chaityas: The temple halls or say shrines of Buddhist monks are called chaityas.
Stupas: A stupa is a heap-like hemispherical structure containing relics of Buddhist monks or nuns. Stupa is used as a place for meditation.
Stupas are built in the most interior ends o the caves.
Viharas: These are monasteries used by Buddhist monks for meditation and the they of Buddhist teachings. Buddhist monks reside in viharas.